DYNAMICS OF THE EARL
Y ST
AGES IN MET
AL-ON-INSULA
TOR THIN FILM DEPOSITION
Linköping 2014
Bo L
ü
Linköping Studies in Science and Technology Licentiate Thesis No. 1687
DYNAMICS
OF
THE
EARLY
STAGES
IN
METAL-ON-INSULATOR
THIN
FILM
DEPOSITION
Bo Lü
Nanoscale Engineering Division
Department of Physics, Chemistry and Biology (IFM) University of Linköping, Sweden