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Bo Lü DEPOSITION METAL-ON-INSULATOR THIN FILM DYNAMICS OF THE EARLY STAGES IN

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DYNAMICS OF THE EARL

Y ST

AGES IN MET

AL-ON-INSULA

TOR THIN FILM DEPOSITION

Linköping 2014

Bo L

ü

Linköping Studies in Science and Technology Licentiate Thesis No. 1687

DYNAMICS

OF

THE

EARLY

STAGES

IN

METAL-ON-INSULATOR

THIN

FILM

DEPOSITION

Bo Lü

Nanoscale Engineering Division

Department of Physics, Chemistry and Biology (IFM) University of Linköping, Sweden

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