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Self-assembled and selective-area growth of group III-nitride semiconductor nanorods by magnetron sputter epitaxy

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Linköping Studies in Science and Technology Dissertation No. 1935

2018

Self-assembled and selective-area

growth of group III-nitride

semiconductor nanorods by magnetron

sputter epitaxy

Elena Alexandra Serban

Se lf-a ss em ble d a nd s ele cti ve -ar ea g row th o f g rou p I II-n itri de s em ico nd uc tor n an oro ds b y m ag ne tro n s pu tte r e pit ax y Elena Ale xandr a Serban

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FACULTY OF SCIENCE AND ENGINEERING

Linköping Studies in Science and Technology, Dissertation No. 1935, 2018 Department of Physics, Chemistry and Biology (IFM)

Linköping University SE-581 83 Linköping, Sweden

www.liu.se

2018 Se lf-a ss em ble d a nd s ele cti ve -ar ea g row th o f g rou p I II-n itri de s em ico nd uc tor n an oro ds b y m ag ne tro n s pu tte r e pit ax y Elena Ale xandr a Serban

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