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Precursors and defect control for halogenated CVD of thick SiC epitaxial layers

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Linköping Studies in Science and Technology Dissertation No. 1625

2014

Precursors and defect control for halogenated

CVD of thick SiC epitaxial layers

Milan Yazdanfar

M ila n Y azd an fa r P re cu rso rs a nd d efe ct c on tro l f or h alo ge na te d C V D o f t hic k S iC e pit ax ia l l ay er s

(2)

Linköping Studies in Science and Technology No. 1625, 2014 Department of Physics, Chemistry and Biology (IFM)

Semiconductor Material se-581 83 Linköping, Sweden

www.liu.se 2014 M ila n Y azd an fa r P re cu rso rs a nd d efe ct c on tro l f or h alo ge na te d C V D o f t hic k S iC e pit ax ia l l ay er s

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