Linköping Studies in Science and Technology Dissertation No. 1625
2014
Precursors and defect control for halogenated
CVD of thick SiC epitaxial layers
Milan Yazdanfar
M ila n Y azd an fa r P re cu rso rs a nd d efe ct c on tro l f or h alo ge na te d C V D o f t hic k S iC e pit ax ia l l ay er sLinköping Studies in Science and Technology No. 1625, 2014 Department of Physics, Chemistry and Biology (IFM)
Semiconductor Material se-581 83 Linköping, Sweden
www.liu.se 2014 M ila n Y azd an fa r P re cu rso rs a nd d efe ct c on tro l f or h alo ge na te d C V D o f t hic k S iC e pit ax ia l l ay er s