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Defect-engineered(Ti,Al)N thin films

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Defect-engineered

(Ti,Al)N thin films

Linköping Studies in Science and Technology

Dissertation No.1878

Isabella Citlalli Schramm Benítez

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FACULTY OF SCIENCE AND ENGINEERING

Linköping Studies in Science and Technology, Dissertation No. 1878, 2017 Department of Physics, Chemistry and Biology

Linköping University SE-581 83 Linköping, Sweden

www.liu.se

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