Defect-engineered
(Ti,Al)N thin films
Linköping Studies in Science and Technology
Dissertation No.1878
Isabella Citlalli Schramm Benítez
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FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology, Dissertation No. 1878, 2017 Department of Physics, Chemistry and Biology
Linköping University SE-581 83 Linköping, Sweden