2014
Doping of high-Al-content AlGaN
grown by MOCVD
Daniel Nilsson
Linköping Studies in Science and Technology Dissertation No. 1597 D ani el N ils so n D op in g o f h ig h-Al -co nte nt Al G aN g ro w n b y M O C VD
Linköping Studies in Science and Technology No. 1597, 2014 The Department of Physics Chemistry and Biology
Semiconductor Materials 581 83 Linköping Sweden www.liu.se 2014 D ani el N ils so n D op in g o f h ig h-Al -co nte nt Al G aN g ro w n b y M O C VD