2015
Linköping Studies in Science and Technology Dissertations No. 1654
CVD solutions for
new directions in
SiC and GaN epitaxy
Xun Li
Xu n L i C VD s olu tio ns f or ne w d ire cti on s i n S iC a nd G aN e pit ax yLinköping Studies in Science and Technology No. 1654, 2015 Department of Physics Chemistry and Biology
Semiconductor Materials 581 83 Linköping Sweden www.liu.se 2015 Xu n L i C VD s olu tio ns f or ne w d ire cti on s i n S iC a nd G aN e pit ax y