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CVD solutions for new directions in SiC and GaN epitaxy

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2015

Linköping Studies in Science and Technology Dissertations No. 1654

CVD solutions for

new directions in

SiC and GaN epitaxy

Xun Li

Xu n L i C VD s olu tio ns f or ne w d ire cti on s i n S iC a nd G aN e pit ax y

(2)

Linköping Studies in Science and Technology No. 1654, 2015 Department of Physics Chemistry and Biology

Semiconductor Materials 581 83 Linköping Sweden www.liu.se 2015 Xu n L i C VD s olu tio ns f or ne w d ire cti on s i n S iC a nd G aN e pit ax y

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