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Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

(2)

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

Axel Flink

Growth and Characterization of

Ti-Si-N Thin Films

Axel Flink

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

2008

Linköping Studies in Science and Technology Dissertation No. 1190

Growth and Characterization of

Ti-Si-N

Thin Films Linköping 2008

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