2014
Linköping Studies in Science and Technology Dissertation No. 1566
Metastable ScAlN and YAlN Thin Films
Grown by Reactive Magnetron Sputter Epitaxy
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Gro wn b y R eac tiv e M ag ne tro n S pu tte r Ep ita xyLinköping Studies in Science and Technology No. 1566, 2014 Thin Film Physics Division
Department of Physics, Chemistry, and Biology (IFM) Linköpings universitet se-581 83 Linköping, Sweden www.liu.se 2014