Linköping Studies in Science and Technology
Licentiate Thesis No. 1570
Nucleation and stress generation
in thin films deposited with a
pulsed energetic deposition flux
Daniel Magnfält
LIU-TEK-LIC-2013:4 Plasma & Coatings Physics DivisionDepartment of Physics, Chemistry and Biology (IFM) Linköping University
SE-581 83 Linköpings Universitet, Sweden
© Daniel Magnfält 2013 ISBN: 978-91-7519-706-7 ISSN: 0280-7971 Printed by LiU-tryck Linköping, Sweden, 2013
Linköping Studies in Science and Technology
Licentiate Thesis No. 1570
Nucleation and stress generation
in thin films deposited with a
pulsed energetic deposition flux
Daniel Magnfält
LIU-TEK-LIC-2013:4 Plasma & Coatings Physics DivisionDepartment of Physics, Chemistry and Biology (IFM) Linköping University
SE-581 83 Linköpings Universitet, Sweden
Daniel Magnfält
Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux