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Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux

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 Linköping Studies in Science and Technology

Licentiate Thesis No. 1570  

 

 

 

Nucleation and stress generation

in thin films deposited with a

pulsed energetic deposition flux

 

Daniel Magnfält

              LIU-TEK-LIC-2013:4 Plasma & Coatings Physics Division

Department of Physics, Chemistry and Biology (IFM) Linköping University

SE-581 83 Linköpings Universitet, Sweden                                                                

 

  © Daniel Magnfält 2013 ISBN: 978-91-7519-706-7 ISSN: 0280-7971 Printed by LiU-tryck Linköping, Sweden, 2013

 Linköping Studies in Science and Technology

Licentiate Thesis No. 1570  

 

 

 

Nucleation and stress generation

in thin films deposited with a

pulsed energetic deposition flux

 

Daniel Magnfält

              LIU-TEK-LIC-2013:4 Plasma & Coatings Physics Division

Department of Physics, Chemistry and Biology (IFM) Linköping University

SE-581 83 Linköpings Universitet, Sweden  

Daniel Magnfält

Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux

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