Departement of Information Technology and Media
Sensor Technology
1
Sensor Technology group
• Read-out Electronics for Pixel Detectors
• Establishment of Experimental Research
Infrastructure
• Introduction
– Purpose
• Establishment of experimental research infrastructure in processing of semiconductor radiation detectors
• Educate undergraduate and graduate student in basic semiconductor processing
• Support the simulation group with samples-test structures for measuring different kind of semiconductor parameters
– Requirement
• The equipment in the clean room must be easy to use and be as flexible as possible
• The equipment must handle small pieces, to wafers with a diameter of 100mm
• The most common processing steps must be represented
Establishment of Experimental
Research Infrastructure
Departement of Information Technology and Media
Sensor Technology
3
Overview of the cleanroom
Outside the cleanroom
• Infrastructure
– Gas store rooms
– Storage for chemicals – Deionised Water
– Ventilation
•Control of:
• Particles
• Temperature
• Humidity
• Exhaust
– Drainage of acids and solvents – Vacuum (for wafer chuck)
– Cooling water
– Compressed air
Departement of Information Technology and Media
Sensor Technology
5
Inside the cleanroom
• Change to cleanroom
clothes • Measurement laboratory
• Dry etch (RIE)
– Electrode distance – Etching chemistry
• SF6, CH4, CHF3
– Pressure – Bias
– Power
Tegal 903e
Tegal 901e
Departement of Information Technology and Media
Sensor Technology
7
• Furnaces
– Diffusion from solid sources
• Boron
• Phosphorus
– Growth of silicondioxide
•dry
• wet (pyrogenic)
– Annealing
•FGA N2/H2
•in N2 or O2 ambient
• Wet etching
• Cleaning
• R/D
• Anisotropic wet etch
Departement of Information Technology and Media
Sensor Technology
9
• Lithographic Processes
– Mask aligner
•Soft contact
•Proximity
– Plasma stripper – Development bench – Softbake furnace – Hardbake furnace – Hotplate
– Spinner
– HMDS furnace
– Place for maskgenerator
• Implantation
– Varian DF4
•Energy 10 keV-200 keV
•BF3 (gas)
•Arsenic (Solid)
•Phosphorus (Solid)
Departement of Information Technology and Media
Sensor Technology
11
• Metallization
– Sputter
– Electron beam evaporator
(to bedelivered in august)
•Six pocket crucible
•High voltage power supply fully semiconductor equipped
• Education
– Course in “Vacuum Technology for Semiconductor Processing” (Given by Doc. Lars Westerberg, chairmen in Swedish Vacuum Society)
•Lectures
•Laboratory exercise
•Study visit at The Svedberg laboratory in Uppsala
• Planned Project
– Pixel detector in silicon – Integrated E-E detector in
silicon
– UV-detector in silicon with two layers antireflective coating
