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Cathodic Arc Synthesis of Ti-Si-C-N Thin Films

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Linköping Studies in Science and Technology, Dissertation No. 1495 Thin Film Physics Division

Department of Physics, Chemistry and Biology (IFM) Linköping University

SE-581 83 Linköping, Sweden www.liu.se

2012

C

athodic Arc Synthesis of Ti-Si-C-N Thin Films

Anders Eriksson

Linköping Studies in Science and Technology Dissertation No. 1495

Cathodic Arc Synthesis of

Ti-Si-C-N Thin Films

Anders Eriksson

Plasma Analysis and Microstructure Formation

References

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