Linköping Studies in Science and Technology, Dissertation No. 1495 Thin Film Physics Division
Department of Physics, Chemistry and Biology (IFM) Linköping University
SE-581 83 Linköping, Sweden www.liu.se
2012
C
athodic Arc Synthesis of Ti-Si-C-N Thin Films
Anders Eriksson
Linköping Studies in Science and Technology Dissertation No. 1495