CVD Chemistry of Organoborons for
Boron-Carbon
Thin Film Depositions
Mewlude Imam
(Maiwulidan Yimamu)
Linköping Studies in Science and Technology
Dissertation No. 1849
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20
17
FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology, Dissertation No. 1849, 2017 Department of Physics, Chemistry and Biology (IFM)
Linköping University SE-581 83 Linköping, Sweden