Fluorinated SiC
CVD
Linköping Studies in Science and Technology
Dissertation No. 1826
Po
ntu
s S
te
nb
erg
Fl
uo
rin
ate
d Si
C C
VD
20
17
Pontus Stenberg
FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology, Dissertation No. 1826, 2017 Department of Physics, Chemistry and Biology (IFM)
Linköping University SE-581 83 Linköping, Sweden