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Fluorinated SiC CVD

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Fluorinated SiC

CVD

Linköping Studies in Science and Technology

Dissertation No. 1826

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d Si

C C

VD

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Pontus Stenberg

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FACULTY OF SCIENCE AND ENGINEERING

Linköping Studies in Science and Technology, Dissertation No. 1826, 2017 Department of Physics, Chemistry and Biology (IFM)

Linköping University SE-581 83 Linköping, Sweden

www.liu.se

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d Si

C C

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References

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