Linköping Studies in Science and Technology. Thesis No. 1628 Licentiate Thesis
Aberration-Corrected Analytical Electron Microscopy of
Transition Metal Nitride and Silicon Nitride Multilayers
Amie Fallqvist
LIU-TEK-LIC-2013:62 Thin Film Physics Division
Department of Physics, Chemistry and Biology Linköping University, SE-581 83 Linköping, Sweden
Linköping, 2013