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Aberration-Corrected Analytical Electron Microscopy of Transition Metal Nitride and Silicon Nitride Multilayers

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Linköping Studies in Science and Technology. Thesis No. 1628 Licentiate Thesis

Aberration-Corrected Analytical Electron Microscopy of

Transition Metal Nitride and Silicon Nitride Multilayers

Amie Fallqvist

LIU-TEK-LIC-2013:62 Thin Film Physics Division

Department of Physics, Chemistry and Biology Linköping University, SE-581 83 Linköping, Sweden

Linköping, 2013

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