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Growth and Characterization of Strain-engineered Si/SiGe Heterostructures Prepared by Molecular Beam Epitaxy

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Linköping Studies in Science and Technology Dissertation No. 1176

Growth and Characterization of

Strain-engineered Si/SiGe Heterostructures

Prepared by Molecular Beam Epitaxy

Ming Zhao

Surface and Semiconductor Physics Division Department of Physics, Chemistry and Biology Linköping University, S-581 83 Linköping, Sweden

Linköping 2008

Ming Zhao

Gr

owth and Characterization of Strain-engineer

ed Si/SiGe Heter

ostructur

es Pr

epar

References

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