Linköping Studies in Science and Technology Dissertation No. 1176
Growth and Characterization of
Strain-engineered Si/SiGe Heterostructures
Prepared by Molecular Beam Epitaxy
Ming Zhao
Surface and Semiconductor Physics Division Department of Physics, Chemistry and Biology Linköping University, S-581 83 Linköping, Sweden
Linköping 2008
Ming Zhao
Gr
owth and Characterization of Strain-engineer
ed Si/SiGe Heter
ostructur
es Pr
epar