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Errata for Licentiate Thesis No. 1474 Deposition and Phase Transformations of Ternary Al-Cr-O Thin Films by Ali Khatibi

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Errata for Licentiate Thesis No. 1474

Deposition and Phase Transformations of Ternary Al-Cr-O Thin Films

by Ali Khatibi

One data point was miscalculated in the experiments to determine the activation energy of phase transformation between cubic and corundum alloy oxide in Paper II. Because of that, I find that the process has the effective activation energy of 336 kJ/mol with a relatively wide error range, instead of the preliminary identified two different activation energies. In consequence, the following corrections apply to the following sections: page i:... Studies on kinetics of phase transformation show the apparent activation energy of the process as 112

32

336+

=

E kJ/mol.

page 25, line # 4 from bottom: This study showed that the phase transformation from fcc phase to corundum phase in Al-Cr-O materials system has an apparent activation energy

of 112

32

336+

=

E kJ/mol.

page 39, line # 7 from bottom: …model. The kinetics of phase transformation is analyzed. The apparent activation energy of this transformation determined from Johnson-Avrami-Mehl model is E=336+11232 kJ/mol, which corresponds to self-diffusion of Cr and Al in their respective binary oxides.

(2)

page 48, table 1: T (ºC) n nlnk lnk 875 0.58±0.11 -1.59±0.16 -2.89±0.83 900 0.82±0.08 -1.64±0.11 -2.03±0.33 925 0.72±0.11 -1.30±0.17 -1.86±0.51 937 0.33±0.05 -0.33±0.08 -1.09±0.41 950 0.40±0.07 0.02±0.10 0.095±0.265 975 0.74±0.04 0.03±0.07 0.045±0.095

page 49, line # 1 from top: Based on eq. (4), the slope of the line fitted linearly to the lnk data points vs. (1/T) is equal to (−E R). This is shown in figure 8. In this figure, the solid black line is the linear fit to the data points extracted from table 1. The slope of this line is used to determine the apparent activation energy of the phase transformation process. The upper red and lower blue dashed lines show the linear fits corresponding to the upper and lower margins of the error bars, respectively. The apparent activation energy of the phase transformation process is thus determined as 112

32

336+

=

E kJ/mol.

Considering the lower (Elower=304 kJ/mol) and upper (Eupper=448 kJ/mol) calculated limits for E, the apparent activation energy of the phase transformation in this study is similar to the activation energies for diffusion of Cr and Al in Al2O3, respectively. The typical values for Cr diffusion in Al2O3 are 173-193 kJ/mol [21], 203-283 kJ/mol [22], and 180-200 kJ/mol [23] for calculation-based analyses, and 266-306 kJ/mol [23] and 265 kJ/mol [24] for experimental studies; which are about the value of Elower. On the other hand, diffusion of Al in Al2O3 and Cr2O3 requires higher activation energies (477 kJ/mol in [23] and 453 kJ/mol in [25], respectively), which are similar to the calculated Eupper. The study performed in Ref. [22] suggests that the diffusion of Al and Cr in Al2O3 operates by a vacancy mechanism, i.e., substitutional diffusion. This is likely the case here; supported by the abundant number of vacancies in the cation sites of our as-deposited fcc-(Al0.32Cr0.68)2O3 film (i.e., 30% in Al/Cr sites; see[13]).

page 49, line # 1 from bottom:…at 1000 °C. The apparent activation energy of this process is 33611232

+ − =

E kJ/mol, which corresponds to metal self-diffusion.

page 50, added references:

[21] J. H. Harding, K. J. W. Atkinson, R. W. Grimes, J. Am. Ceram. Soc. 86 (2003) 554.

[22] N. Takahashi, T. Mizoguchi, T. Nakagawa, T. Tohei, I. Sakaguchi, A. Kuwabara, N. Shibata, T. Yamamoto, N. Ohashi, Y. Ikuhara, Phys. Rev. B 82 (2010) 174302.

[23] R. H. Doremus, J. Appl. Phys. 100 (2006) 101301.

[24] K. Bedu-Amissah, J. M. Rickman, H. M. Chan, M. P. Harmer, J. Am. Ceram. Soc. 90 (2007) 1551. [25] U. Rothhaar, H. Oechsner, Thin Solid Films 324 (1998) 165.

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