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Magnetron Sputter Epitaxy of GaN

Epilayers and Nanorods Muhammad Junaid

Linköping Studies in Science and Technology, Dissertation No. 1482

Linköping Studies in Science and Technology, Dissertation No. 1482, 2012 Thin Film Physics Division

Department of Physics, Chemistry and Biology SE-581 83 Linköping, Sweden

www.liu.se

Magnetron Sputter Epitaxy of GaNMuhammad Junaid2012

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