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Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS

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Carbon Nitride and Carbon Fluoride

Thin Films Prepared by

HiPIMS

Susann Schmidt

Linköping Studies in Science and Technology. Dissertation, No. 1512

Linköping Studies in Science and Technology. Dissertation, No. 1512 Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University Sweden

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References

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