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Characterization of Ti2

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Linköping Studies in Science and Technology Licentiate Thesis No. 1357

Characterization of Ti

2

AlC Coatings

Deposited with High Velocity Oxy-Fuel

and Magnetron Sputtering Techniques

Jenny Frodelius

LIU-TEK-LIC-2008:15 Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM) Linköping University

SE-581 83 Linköping, Sweden

© Jenny Frodelius 2008

ISBN: 978-91-7393-936-2

ISSN 0280-7971

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