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Linköping Studies in Science and Technology Licentiate Thesis No. 1456
LIU-TEK-LIC-2010:27 Thin Film Physics Division
Department of Physics, Chemistry and Biology (IFM) Linköping University
SE-581 83 Linköping, Sweden
A n d e rs E ri k s s o n C a th o d ic A rc S y n th e s is o f T i-S i-C -N T h in F ilm s fro m T e rn a ry C a th o d e s L in k ö p in g 2 0 1 0
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