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HannaFager GrowthandCharacterizationofAmorphousTiAlSiNandHfAlSiNThinFilms Link¨opingStudiesinScienceandTechnologyLicentiateThesisNo.1542

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Link¨oping Studies in Science and Technology

Licentiate Thesis No. 1542

Growth and Characterization of Amorphous

TiAlSiN and HfAlSiN Thin Films

Hanna Fager

LIU-TEK-LIC-2012:27

Thin Film Physics Division

Department of Physics, Chemistry, and Biology (IFM)

Link¨oping University, SE-581 83 Link¨

oping, Sweden

Link¨

oping 2012

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LIU-TE K -LIC-2012: 27 T hin Film Ph ys ic s Divis io n D ep ar tmen t of P h y si cs, Ch emi str y, an d Bi ol ogy (IF M ) L ink¨ oping U niv ers it y, SE -5 81 83 L ink¨ o ping , Sw ede n L ink¨ o ping 20 12

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LIU-TE K -LIC-2012: 27 T hin Film Ph ys ic s Divis io n D ep ar tmen t of P h y si cs, Ch emi str y, an d Bi ol ogy (IF M ) L ink¨ oping U niv ers it y, SE -5 81 8 3 L ink¨ oping , Sw ede n L ink¨ oping 20 1 2

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References

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