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Chemical Vapour Deposition of sp2 Hybridised Boron Nitride

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Chemical Vapour Deposition of sp 2 Hybridised Boron Nitride

Mikhail Chubarov

Linköping Studies in Science and technology Dissertation No. 1632

Thin Film Physics Division

Department of Physics, Chemistry and Biology (IFM) Linköping University,

SE-58183 Linköping, Sweden Linköping 2015

M ikh ail C hu bar ov Ch em ica l V ap ou r D ep osi tio n o f s p

2

H ybri dise d B oro n N itri de 20 15

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