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High temperature behavior of arc evaporated ZrAlN and TiAlN thin films

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High temperature behavior of arc

evaporated ZrAlN and TiAlN thin films

Lina Rogström

Linköping studies in science and technology. Dissertations, No. 1428

Linköping studies in science and technology. Dissertations, No. 1428 Nanostructured Materials

Department of Physics, Chemistry, and Biology (IFM) Linköping University, Sweden

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