Investigation of Metallic Dust formed on Steel Substrates in Solar Cell Sputtering
Chambers
Jakob Friberg
Materials Engineering, master's level 2019
Luleå University of Technology
Department of Engineering Sciences and Mathematics
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◦
◦
μ
𝛥𝐺 = 𝛥𝐻 − 𝑇𝛥𝑆
Θ = kpi 1 + 𝑘𝑝𝑖
Ω
Ω =hσ2 ET σ
ε ε
Δσαβ =𝐸ΔαΔT 1 − 𝜈 𝛿𝛼𝛽
α ν
δ
◦
I
SCV
OCP
mFF = 𝑃𝑚
𝑉𝑂𝐶 × 𝐼𝑆𝐶
𝐷𝑆𝐼 = 𝐺𝑟𝑒𝑒𝑛 𝑎𝑛𝑑 𝑟𝑒𝑑 𝑚𝑎𝑠𝑘𝑒𝑑 𝑝𝑖𝑥𝑒𝑙𝑠 𝑇𝑜𝑡𝑎𝑙 𝑖𝑚𝑎𝑔𝑒 𝑝𝑖𝑥𝑒𝑙𝑠
.
◦ ◦
◦
θ
μ
μ
θ
•
•
o o o o
On Off
μ μ
S9 S13 S17 S25
Ω =hσ2 ET σ
ε ε
μ μ
DP Diameter DP Thickness
δ
δ γ δ γ γ
γ β β α
β α
ε
sσ ε
fε
sε
fσ
ε
s= ε
f; α
s< α
fδ β
δ β
δ γ β
α δ β α
β
δ
α β γ
δ β α
β
μ
𝜎𝑓𝑖𝑙𝑚= 𝜎𝑟𝑒𝑠𝑖𝑑𝑢𝑎𝑙− |𝜎𝑐𝑒𝑙𝑙 𝑏𝑒𝑛𝑑𝑖𝑛𝑔|− |𝜎𝑝ℎ𝑎𝑠𝑒 𝑐ℎ𝑎𝑛𝑔𝑒| + | 𝜎𝐶𝑇𝐸|
μ μ
Steel A Steel B