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Investigation of Metallic Dust formed on Steel Substrates in Solar Cell Sputtering Chambers

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Investigation of Metallic Dust formed on Steel Substrates in Solar Cell Sputtering

Chambers

Jakob Friberg

Materials Engineering, master's level 2019

Luleå University of Technology

Department of Engineering Sciences and Mathematics

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(3)
(4)
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(6)

(7)

μ

(8)
(9)
(10)

𝛥𝐺 = 𝛥𝐻 − 𝑇𝛥𝑆

(11)

Θ = kpi 1 + 𝑘𝑝𝑖

(12)
(13)

Ω =hσ2 ET σ

ε ε

(14)

Δσαβ =𝐸ΔαΔT 1 − 𝜈 𝛿𝛼𝛽

α ν

δ

(15)
(16)

(17)
(18)

I

SC

V

OC

P

m

(19)

FF = 𝑃𝑚

𝑉𝑂𝐶 × 𝐼𝑆𝐶

(20)

𝐷𝑆𝐼 = 𝐺𝑟𝑒𝑒𝑛 𝑎𝑛𝑑 𝑟𝑒𝑑 𝑚𝑎𝑠𝑘𝑒𝑑 𝑝𝑖𝑥𝑒𝑙𝑠 𝑇𝑜𝑡𝑎𝑙 𝑖𝑚𝑎𝑔𝑒 𝑝𝑖𝑥𝑒𝑙𝑠

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.

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(24)

θ

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μ

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(27)

μ

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θ

(29)

o o o o

(30)

On Off

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μ μ

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S9 S13 S17 S25

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Ω =hσ2 ET σ

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ε ε

μ μ

DP Diameter DP Thickness

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δ

δ γ δ γ γ

γ β β α

β α

ε

s

σ ε

f

ε

s

ε

f

σ

ε

s

= ε

f

; α

s

< α

f

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δ β

δ β

δ γ β

α δ β α

β

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δ

α β γ

δ β α

β

μ

𝜎𝑓𝑖𝑙𝑚= 𝜎𝑟𝑒𝑠𝑖𝑑𝑢𝑎𝑙− |𝜎𝑐𝑒𝑙𝑙 𝑏𝑒𝑛𝑑𝑖𝑛𝑔|− |𝜎𝑝ℎ𝑎𝑠𝑒 𝑐ℎ𝑎𝑛𝑔𝑒| + | 𝜎𝐶𝑇𝐸|

(41)

μ μ

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Steel A Steel B

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References

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