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Thin Film and Plasma Characterization of PVD Oxides

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Thin Film and Plasma

Characterization of

PVD Oxides

Linköping Studies in Science and Technology

Licentiate Thesis No. 1769

Ludvig Landälv

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FACULTY OF SCIENCE AND ENGINEERING

Linköping Studies in Science and Technology, Licentiate Thesis No. 1769 Department of Physics, Chemistry, and Biology (IFM)

Linköping University SE-581 83 Linköping, Sweden

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