Thin Film and Plasma
Characterization of
PVD Oxides
Linköping Studies in Science and Technology
Licentiate Thesis No. 1769
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FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology, Licentiate Thesis No. 1769 Department of Physics, Chemistry, and Biology (IFM)
Linköping University SE-581 83 Linköping, Sweden