Atom Probe
Tomography of
TiSiN Thin Films
Linköping Studies in Science and Technology
Licentiate Thesis No. 1733
David Engberg
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Faculty of Science and Engineering
Linköping Studies in Science and Technology, Licentiate Thesis No. 1733 Department of Physics, Chemistry, and Biology (IFM)
Linköping University SE-581 83 Linköping, Sweden