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Synthesis of Carbon-based and Metal-Oxide Thin Films using High Power Impulse Magnetron Sputtering

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Synthesis of Carbon-based and Metal-Oxide

Thin Films using High Power Impulse

Magnetron Sputtering

Asim Aijaz

Linköping Studies in Science and Technology Dissertation No. 1572

Linköping Studies in Science and Technology No. 1572, 2014 Plasma & Coatings Physics

Departmen of Physics, Chemistry and Biology (IFM) Linköping University

SE-581 83 Linköping, Sweden www.liu.se

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