Deposition of Al-doped ZnO
films by high power impulse
magnetron sputtering
Linköping Studies in Science and Technology
Dissertation No. 1889
Martin Mickan
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FACULTY OF SCIENCE AND ENGINEERING
Linköping Studies in Science and Technology, Dissertation No. 1889, 2017 Department of Physics, Chemistry and Biology (IFM)
Linköping University SE-581 83 Linköping, Sweden